离子预防反馈超薄膜技术

Thin Film Physics and Applications Pub Date : 1998-02-20 DOI:10.1117/12.300701

D. Jiang, Jingquan Tian, Guo-Jun Liu, Yaohua Lu, Ye Li, L. Fu, Guifen Wang

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引用次数: 0

摘要

本文介绍了防离子反馈用超薄膜的材料、结构及形成方法。给出了其特性和测量结果。同时，进行了初步的分析和探讨。

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Technology of ultrathin films for ion-preventive feedback

This paper introduces the materials and structure as well as the forming method of ultrathin films for ion-preventative feedback. The characteristics and measuring results are given. In the meantime, preliminary analysis and discussion are carried out.

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Thin Film Physics and Applications

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