一种适用于恶劣环境的被动电磁压力传感器

2018 IEEE Indian Conference on Antennas and Propogation (InCAP) Pub Date : 2018-12-01 DOI:10.1109/INCAP.2018.8770738

Meena, A. Patnaik

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引用次数: 0

摘要

本文提出了一种适用于高温环境的新型电磁无源压力传感器。通过这项工作，我们打算探索使用碳化硅作为所提议的传感器衬底的可能性。压力变化是通过在矩形腔上形成的薄膜的偏转来感测的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A Passive Electromagnetic Pressure Sensor for Application in Harsh Environments

In this paper, a novel electromagnetic passive pressure sensor is proposed for high temperature environment applications. Through this work, we intend to explore the possibility of usage of silicon carbide as a substrate for the proposed sensor. Pressure variations are sensed by deflection of a thin membrane which is formed on a rectangular cavity.

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来源期刊

2018 IEEE Indian Conference on Antennas and Propogation (InCAP)

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