{"title":"用于谐波激励MEMS位移映射的低成本简易干涉仪","authors":"M. Ma̧dzik, Jaime Viegas","doi":"10.1117/12.2213822","DOIUrl":null,"url":null,"abstract":"In this work, we present a simple, assembled from readily available components, low cost, imaging vibrometer based on a Twyman-Green interferometer with digital interferogram acquisition, allowing to map displacement contour levels of a harmonically excited piezoelectric membrane, on the principle of exposure integration. We experimentally demonstrate the capabilities of our setup on imaging the 4th mechanical mode of vibration of a 200 micrometer radius piezoelectric micromachined ultrasonic transducer membrane vibrating at 842 kHz, with an out-of-plane amplitude of 475 nm. Our results allow a direct visualization of the influence of etching trenches onto the vibrating membrane, in excellent agreement with FEM simulations.","PeriodicalId":122702,"journal":{"name":"SPIE OPTO","volume":"55 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-03-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Low-cost facile interferometer for displacement mapping of harmonically excited MEMS\",\"authors\":\"M. Ma̧dzik, Jaime Viegas\",\"doi\":\"10.1117/12.2213822\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work, we present a simple, assembled from readily available components, low cost, imaging vibrometer based on a Twyman-Green interferometer with digital interferogram acquisition, allowing to map displacement contour levels of a harmonically excited piezoelectric membrane, on the principle of exposure integration. We experimentally demonstrate the capabilities of our setup on imaging the 4th mechanical mode of vibration of a 200 micrometer radius piezoelectric micromachined ultrasonic transducer membrane vibrating at 842 kHz, with an out-of-plane amplitude of 475 nm. Our results allow a direct visualization of the influence of etching trenches onto the vibrating membrane, in excellent agreement with FEM simulations.\",\"PeriodicalId\":122702,\"journal\":{\"name\":\"SPIE OPTO\",\"volume\":\"55 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-03-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"SPIE OPTO\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2213822\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE OPTO","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2213822","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Low-cost facile interferometer for displacement mapping of harmonically excited MEMS
In this work, we present a simple, assembled from readily available components, low cost, imaging vibrometer based on a Twyman-Green interferometer with digital interferogram acquisition, allowing to map displacement contour levels of a harmonically excited piezoelectric membrane, on the principle of exposure integration. We experimentally demonstrate the capabilities of our setup on imaging the 4th mechanical mode of vibration of a 200 micrometer radius piezoelectric micromachined ultrasonic transducer membrane vibrating at 842 kHz, with an out-of-plane amplitude of 475 nm. Our results allow a direct visualization of the influence of etching trenches onto the vibrating membrane, in excellent agreement with FEM simulations.