优化的CMOS红外探测器微系统

1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings Pub Date : 1995-11-06 DOI:10.1109/TENCON.1995.496372

N. Schneeberger, S. Deteindre, O. Paul, H. Baltes

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引用次数: 7

摘要

我们制作并表征了四种不同的CMOS热电红外辐射传感器微系统。基于测量的材料性能，使用SOLIDIS有限元仿真包对这些系统的性能进行了建模。与实验结果的一致性优于7.5%。在此基础上，对微系统的设计参数进行了优化。

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Optimized CMOS infrared detector microsystems

We fabricated and characterized four different CMOS thermoelectric infrared radiation sensor microsystems. The performance of these systems was modelled with the finite element simulation package SOLIDIS, based on measured materials properties. The agreement with experiment was better than 7.5%. Based on this validation we optimized the design parameters of such microsystems.

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来源期刊

1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings

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