空间电荷弛豫引起击穿时释放的能量

Proceedings of IEEE Conference on Electrical Insulation and Dielectric Phenomena - (CEIDP '93) Pub Date : 1993-10-17 DOI:10.1109/CEIDP.1993.378982

D. Moya-Siesse, G. Moya, C. Legressus, G. Blaise

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引用次数: 3

摘要

描述了一种在扫描电子显微镜下通过电子束充电后，能够就地测量小尺寸电介质释放能量的系统。该装置在脱除过程中观察到击穿现象。通过焦耳效应和激光照射技术进行的初步校准表明，通过放大器，该装置的灵敏度目前对应于模拟信号，偏差为0.70 /spl mu/Watt/mm。通过在注入前将电子束聚焦在接地钢板上，可以确定热事件的性质(吸热或放热)。初步结果表明，在电荷脱捕击穿产生的事件中可能会出现放热信号，而不能检测到缓慢的脱捕

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Energy released during space charge relaxation induced breakdown

A system able to measure in situ, after charging by an electron beam in a SEM, the energy released for small-sized dielectrics is described. The device observe the phenomena of breakdown during detrapping. Preliminary calibration by the Joule effect and by a laser irradiation technique has shown that the sensitivity of the device presently corresponds, through an amplifier, to an analog signal, giving a deviation of 0.70 /spl mu/Watt/mm. The nature of the thermal event (endothermic or exothermic) can be established by focusing the electron beam on the grounded steel sheet before implantation. Preliminary results show that an exothermic signal may occur during the event produced by the charge detrapping breakdown, whereas a slow detrapping cannot be detected.<>

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Proceedings of IEEE Conference on Electrical Insulation and Dielectric Phenomena - (CEIDP '93)

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