器件尺寸对深亚微米晶体管可靠性的影响——SRAM可靠性趋势研究

M. White, Bing Huang, J. Qin, Z. Gur, M. Talmor, Yuan Chen, J. Heidecker, Due Nguyen, J. Bernstein
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引用次数: 3

摘要

随着微电子技术被扩展到深亚微米范围,先进技术CMOS的用户,特别是在高可靠性应用中,应该重新评估缩放效应如何影响长期可靠性。提出了一项基于实验的工业级sram可靠性研究,该可靠性研究由三个不同的技术节点组成,以验证温度和电压寿命-应力关系的电流加速模型。这项可靠性研究利用步进应力技术来评估当今许多高可靠性空间/航空航天应用中嵌入的存储技术(0.25、0.15和0.13mum)。提出了两种加速度建模方法,将实验FIT计算与Mfr的鉴定数据联系起来
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Impact of device scaling on deep sub-micron transistor reliability - a study of reliability trends using SRAM
As microelectronics are scaled in to the deep sub-micron regime, users of advanced technology CMOS, particularly in high-reliability applications, should reassess how scaling effects impact long-term reliability. An experimental based reliability study of industrial grade SRAMs, consisting of three different technology nodes, is proposed to substantiate current acceleration models for temperature and voltage life-stress relationships. This reliability study utilizes step-stress techniques to evaluate memory technologies (0.25mum, 0.15mum, and 0.13mum) embedded in many of today's high-reliability space/aerospace applications. Two acceleration modeling approaches are presented to relate experimental FIT calculations to Mfr's qualification data
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