飞秒激光脉冲在镍表面诱导的规则亚波长表面结构

L. Qi
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摘要

本文研究了飞秒激光脉冲在镍表面形成激光诱导周期表面结构(LIPSS)的过程。在实验中,我们使用了一种市售的放大Ti:蓝宝石激光系统,该系统在1 kHz重复率下产生164 fs的激光脉冲,最大脉冲能量(Ep)为1 mJ,中心波长λ= 780 nm。为了获得表面纳米结构的精细周期性有序,激光束通过位于10倍物镜附近的0.2 mm针孔孔径聚焦到样品上。将样品置于xyz平移台上,进行静态和线扫描辐照实验。用扫描电镜观察了诱导周期结构的形貌。用原子力显微镜测量表面轮廓。周期在700 nm左右的LIPSS完全覆盖了照射区域。在线扫描实验中,镍表面产生了大面积的LIPSS。讨论了静态辐照下整个辐照区LIPSS的形成机理。研究了0.2 mm针孔孔径的作用。在镍表面上有规则的LIPSS改变了表面的光学性质。镍表面有规则的LIPSS也可应用于微模具制造。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Regular sub-wavelength surface structures induced by femtosecond laser pulses on nickel
In this research, the formation of laser-induced periodic surface structures (LIPSS) on the nickel surface by femtosecond laser pulses was investigated. In the experiment, we used a commercially available amplified Ti:sapphire laser system that generated 164 fs laser pulses with a maximum pulse energy (Ep) of 1 mJ at a 1 kHz repetition rate and with a central wavelength λ= 780 nm. To obtain a fine periodic ordering of surface nanostructures, the laser beam, through a 0.2 mm pinhole aperture positioned near the 10× objective lens, was focused onto the sample. The samples were mounted on an XYZ-translation stage and irradiated in static and line-scanning experiment. The morphology of the induced periodic structure was examined by scanning electron microscopy. The surface profile was measured by atomic force microscopy. LIPSS with a period of around 700 nm entirely covered the irradiated area. Large area of LIPSS in the nickel surface was produced in line-scanning experiment. The mechanism of the formation of LIPSS in the entire irradiated area in static irradiation was discussed. The function of a 0.2 mm pinhole aperture was studied. The regular LIPSS on the nickel surface changed the optical property of the surface. The regular LIPSS on nickel surface could be also applied on the micro-mould fabrication.
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