MEMS宏观模型构建方法

2008 18th International Crimean Conference - Microwave & Telecommunication Technology Pub Date : 2008-11-18 DOI:10.1109/CRMICO.2008.4676326

V. V. Ladogubets, A. Y. Beznosyk, A. D. Finogenov, A. Tchkalov

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引用次数: 0

摘要

提出了用有限元数学模型来接收机械部件等效电路的方法。将此方法推广到MEMS元件等效电路的获取上。为了减小接收电路的尺寸，建议使用rlc缩减。给出了微加速度计等效电路的计算实例。

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MEMS macromodels construction method

It is offered to use a finite-element mathematic model for receiving the equivalent electrical circuit of mechanical components. The given approach is spread on getting the equivalent circuits for MEMS components. To reduce dimensions of the circuits received it is proposed to use the RLC-reduction. The example of getting micro-accelerometerpsilas equivalent electrical circuit is considered.

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2008 18th International Crimean Conference - Microwave & Telecommunication Technology

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