SIMOX衬底上的硅单电子晶体管

K. Murase, Y. Talahashi, A. Fujiwara, M. Nagase, M. Tabe
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引用次数: 2

摘要

直到最近,单电子晶体管只能在非常低的温度下工作,大多低于1k。相比之下,使用模式依赖氧化技术在SIMOX衬底上制造的Si单电子晶体管即使在室温下也表现出电导振荡。此外,在特殊设计的硅单电子晶体管中观察到单电子记忆效应。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Silicon single-electron transistors on a SIMOX substrate
Until recently, single-electron transistors have only been operable at very low temperatures, mostly below 1 K. By contrast, Si single-electron transistors fabricated on a SIMOX substrate by using a pattern-dependent oxidation technique show conductance oscillations even at room temperature. In addition, a single-electron memory effect is observed in specially designed Si single-electron transistors.
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