反应磁控溅射:一种离线参数辨识方法

2021 IEEE 15th International Symposium on Applied Computational Intelligence and Informatics (SACI) Pub Date : 2021-05-19 DOI:10.1109/SACI51354.2021.9465630

A. Kelemen, Róbert Rossi Madarász

{"title":"反应磁控溅射:一种离线参数辨识方法","authors":"A. Kelemen, Róbert Rossi Madarász","doi":"10.1109/SACI51354.2021.9465630","DOIUrl":null,"url":null,"abstract":"The goal of this paper is the offline parameter identification of the Berg model, intended to be used for magnetron sputtering and thin film deposition process control. A graphical parameter estimation method is developed using simplified equations that contain only the most significant terms in both metallic and poisoned modes of operation. The approximations are based on numerical examples. Special experiment conditions are also formulated that better facilitate the identification of some model parameters.","PeriodicalId":321907,"journal":{"name":"2021 IEEE 15th International Symposium on Applied Computational Intelligence and Informatics (SACI)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Reactive magnetron sputtering: an offline parameter identification method\",\"authors\":\"A. Kelemen, Róbert Rossi Madarász\",\"doi\":\"10.1109/SACI51354.2021.9465630\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The goal of this paper is the offline parameter identification of the Berg model, intended to be used for magnetron sputtering and thin film deposition process control. A graphical parameter estimation method is developed using simplified equations that contain only the most significant terms in both metallic and poisoned modes of operation. The approximations are based on numerical examples. Special experiment conditions are also formulated that better facilitate the identification of some model parameters.\",\"PeriodicalId\":321907,\"journal\":{\"name\":\"2021 IEEE 15th International Symposium on Applied Computational Intelligence and Informatics (SACI)\",\"volume\":\"19 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-05-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2021 IEEE 15th International Symposium on Applied Computational Intelligence and Informatics (SACI)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SACI51354.2021.9465630\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 IEEE 15th International Symposium on Applied Computational Intelligence and Informatics (SACI)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SACI51354.2021.9465630","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

本文的目标是Berg模型的离线参数辨识，拟用于磁控溅射和薄膜沉积过程的控制。本文提出了一种图形化的参数估计方法，该方法使用简化的方程，在金属和中毒操作模式下只包含最重要的项。这些近似是基于数值实例的。为了更好地识别某些模型参数，还制定了特殊的实验条件。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Reactive magnetron sputtering: an offline parameter identification method

The goal of this paper is the offline parameter identification of the Berg model, intended to be used for magnetron sputtering and thin film deposition process control. A graphical parameter estimation method is developed using simplified equations that contain only the most significant terms in both metallic and poisoned modes of operation. The approximations are based on numerical examples. Special experiment conditions are also formulated that better facilitate the identification of some model parameters.

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2021 IEEE 15th International Symposium on Applied Computational Intelligence and Informatics (SACI)

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