{"title":"激光烧蚀制备集成光学应用的复杂光学微元件","authors":"G. Vázquez, A. Harhira, R. Bosisio, R. Kashyap","doi":"10.1117/12.847104","DOIUrl":null,"url":null,"abstract":"Complex concatenated channel waveguides and multimode interference devices have been fabricated by laser ablation of silica-on-silicon substrates for the first time to our knowledge. The technique is based on a tightly focused carbon dioxide laser beam that modifies the refractive index of the area sorrounding the optical waveguide; the process is fast (a few seconds) without any subsequent mechanical or chemical treatment, and the writing speed is about 500 times faster than with UV or femtosecond writing. The results are encouraging for prototyping for the development of an optical sixport device, the equivalent of the widely known microwave technique for amplitude and phase measurements.","PeriodicalId":359625,"journal":{"name":"Symposium on Optics in Industry","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Complex optical microcomponents for integrated-optic applications fabricated by laser ablation\",\"authors\":\"G. Vázquez, A. Harhira, R. Bosisio, R. Kashyap\",\"doi\":\"10.1117/12.847104\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Complex concatenated channel waveguides and multimode interference devices have been fabricated by laser ablation of silica-on-silicon substrates for the first time to our knowledge. The technique is based on a tightly focused carbon dioxide laser beam that modifies the refractive index of the area sorrounding the optical waveguide; the process is fast (a few seconds) without any subsequent mechanical or chemical treatment, and the writing speed is about 500 times faster than with UV or femtosecond writing. The results are encouraging for prototyping for the development of an optical sixport device, the equivalent of the widely known microwave technique for amplitude and phase measurements.\",\"PeriodicalId\":359625,\"journal\":{\"name\":\"Symposium on Optics in Industry\",\"volume\":\"13 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-09-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Symposium on Optics in Industry\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.847104\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Symposium on Optics in Industry","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.847104","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Complex optical microcomponents for integrated-optic applications fabricated by laser ablation
Complex concatenated channel waveguides and multimode interference devices have been fabricated by laser ablation of silica-on-silicon substrates for the first time to our knowledge. The technique is based on a tightly focused carbon dioxide laser beam that modifies the refractive index of the area sorrounding the optical waveguide; the process is fast (a few seconds) without any subsequent mechanical or chemical treatment, and the writing speed is about 500 times faster than with UV or femtosecond writing. The results are encouraging for prototyping for the development of an optical sixport device, the equivalent of the widely known microwave technique for amplitude and phase measurements.