大位移压电驱动器的设计与制造

2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) Pub Date : 2015-10-01 DOI:10.1109/SPAWDA.2015.7364485

Qiaosheng Pan, Yongbin Liu, Yu-hai Liu, Li-jiao Gong, Liangguo He, Z. Feng

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引用次数: 7

摘要

制备了26层0.7mm的锆钛酸铅(PZT-4)多层致动器(18mm×18mm×10mm)。这些驱动器是在实验室制造的，工艺简单，成本低。这种新的制作方法不仅大大降低了压电堆的成本，而且使在实验室中获得所需尺寸的压电堆成为可能。设计、制作并测试了与所制备的多层作动器相匹配的微位移放大器。实验结果表明，该微位移放大器在准静态条件下可获得160 um的峰值位移。

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Design and fabrication of a large displacement piezoelectric actuator

Multilayer actuators with twenty-six 0.7mm-layers (18mm×18mm×10mm) of lead zirconate titanate (PZT-4) were made and tested. These actuators were fabricated in the laboratory with simple techniques and cost low. The new fabrication method not only greatly reduced the cost of piezoelectric stack, but also made it possible to obtain any required size of piezoelectric stacks in the laboratory. A micro-displacement amplifier to match the fabricated multilayer actuators is also designed, fabricated and test. Experiment results show that the micro-displacement amplifier can obtain a peak to peak displacement of 160 um under the quasi-static condition.

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2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)

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