交变载荷作用下弹性基底上薄膜的屈曲传播

2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI:10.1109/3M-NANO.2012.6472976

W. He, Shibin Wang, D. Cui, H. Jia, Lin’an Li

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引用次数: 1

摘要

沉积在弹性基底上的金属薄膜在微机电系统(MEMS)中广泛用作电极和互连，其疲劳性能需要充分的了解。本文对纳米薄膜在交变载荷作用下依赖于衬底的屈曲传播进行了实验研究。从频率、膜厚和循环次数等方面讨论了加载条件对屈曲传播的影响。特别是利用数字图像处理技术对屈曲生长速率进行了分析。此外，还设计了两种样品来比较不同材料的影响。

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Buckling propagation of thin films on elastic substrates under alternating load

Thin metal films deposited on elastic substrates are widely used as electrodes and interconnects in Micro-Electro-Mechanical Systems (MEMS) and their fatigue property needs to be sufficiently understood. In this paper, the buckling propagation of nano-thin film relying on a substrate under alternating load has been experimentally studied. The effect of loading condition on buckling propagation is discussed in terms of the frequency, film thickness and number of cycles. In particular, buckling growth rate has been analyzed by means of digital image processing technology. Moreover, two kinds of samples have been designed to compare the influence of different materials.

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2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

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