高温用Langasite表面声波传感器

Proceedings of the 2000 IEEE/EIA International Frequency Control Symposium and Exhibition (Cat. No.00CH37052) Pub Date : 2000-06-07 DOI:10.1109/FREQ.2000.887339

M. Honal, R. Fachberger, T. Holzheu, E. Riha, E. Born, P. Pongratz, A. Bausewein

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引用次数: 21

摘要

Langasite (La/sub 3/Ga/sub 5/SiO/sub 14/)已成功地用作工作温度高达1000/spl℃的表面声波(SAW)器件的压电衬底。对材料的质量和高温稳定性进行了新的研究。除了SAW器件的高温测量和热分析外，还研究了其光吸收特性和电导率。采用x射线形貌、化学蚀刻、光学显微镜等方法对不同厂家生产的LGS晶圆进行了晶体质量检测。

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Langasite surface acoustic wave sensors for high temperatures

Langasite (La/sub 3/Ga/sub 5/SiO/sub 14/) has been used successfully as a piezoelectric substrate for surface acoustic wave (SAW) devices operating up to 1000/spl deg/C. New investigations of material properties concerning the quality as well as the stability at high temperatures are presented. Apart from high temperature measurements on SAW devices and thermal analyses, optical absorption properties and the electric conductivity have been investigated. The crystal quality has been examined by various methods such as X-ray topography and chemical etching combined with optical microscopy for many LGS wafers from different growers.

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Proceedings of the 2000 IEEE/EIA International Frequency Control Symposium and Exhibition (Cat. No.00CH37052)

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