微镜弯曲结构中光热活塞运动的表征

2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI:10.1109/OMN.2019.8925216

H. Hall, K. Enstrom, G. Cook, S. McDaniel, David Torres, R. Panas

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引用次数: 0

摘要

通过实验和仿真研究了固定增材制造挠曲支撑的六角形微镜的光热活塞运动。结果表明，聚合物弯曲结构随入射功率的增加呈现非线性膨胀行为，且具有超调的高阶低频动态响应。

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Characterization of Photothermomechanical Piston Motion in Micromirror Flexure Structures

Photothermomechanical piston motion of hexagonal micromirrors supported by fixed additively manufactured flexures is examined experimentally and by simulation. Results suggest a nonlinear expansion behavior of the polymer flexure structure with incident power and a higher-order low frequency dynamic response with overshoot.

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2019 International Conference on Optical MEMS and Nanophotonics (OMN)

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