以倒装封装为例,用局部热传感器对界面分层进行现场监测

B. Wunderle, D. May, M. A. Ras, S. Sheva, M. Schulz, M. Wohrmann, J. Bauer, J. Keller
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引用次数: 5

摘要

我们开发了一种新颖、快速、可靠和无损的实验技术,用于电子封装界面分层的原位监测。该方法基于所谓的thxels(热像素)的简单热传感器矩阵,它允许对分层的当前状态进行空间分辨率的实时图像。换能器是小的金属线弯曲,使用众所周知的3-omega方法驱动和电读出。该方法在鲁棒性、灵敏度和信噪比等方面优于其他热对比方法。值得注意的是没有交叉效应。概念的证明已经提供了一个工业级倒装芯片封装与底料在有机基板上。这项技术对于埋藏界面来说尤其强大,因为像扫描声学显微镜(SAM)这样历史悠久的方法无法应用于埋藏界面。由于该技术有效地执行热扩散敏感扫描,它不仅可用于包装鉴定期间的压力测试,而且传感器在其他健康监测领域的应用似乎也是可能的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
In-situ monitoring of interface delamination by local thermal transducers exemplified for a flip-chip package
We have developed a novel, rapid, robust and non-destructive experimental technique for in-situ monitoring of delamination of interfaces for electronic packages. The method is based on a simple thermal transducer matrix of so-called THIXELS (thermal pixels) which allows a spatially resolved real-time image of the current status of delamination. The transducers are small metal wire meanders which are driven and electrically read out using the well-known 3-omega method. This method has special advantages over other thermal contrast methods with respect to robustness, sensitivity and signal-to-noise ratio. Notable is the absence of cross-effects. The proof of concept has been furnished on an industry-grade flip-chip package with underfill on an organic substrate. The technique is especially powerful for buried interfaces, where time-honoured methods like scanning acoustic microscopy (SAM) cannot be applied. As the technique effectively performs a thermal diffusivity sensitive scan, it may not only be useful for stress testing during package qualification, but sensor applications on other fields of health monitoring seem also possible.
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