{"title":"制造平衡衍射阶的衍射光栅","authors":"Dongli Hong, B. Kim, M. Cha","doi":"10.1109/CLEOPR.2007.4391394","DOIUrl":null,"url":null,"abstract":"We made surface-relief gratings of photoresist with different duty cycles in order to achieve relatively balanced intensities of the diffracted orders (up to the third orders). Grating with a duty cycle of ~1:3 gave relatively balanced power division among the 0, plusmn1, and plusmn2nd diffracted orders.","PeriodicalId":384775,"journal":{"name":"2007 Conference on Lasers and Electro-Optics - Pacific Rim","volume":"7 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Fabrication of Diffraction Gratings for Producing Balanced Diffraction Orders\",\"authors\":\"Dongli Hong, B. Kim, M. Cha\",\"doi\":\"10.1109/CLEOPR.2007.4391394\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We made surface-relief gratings of photoresist with different duty cycles in order to achieve relatively balanced intensities of the diffracted orders (up to the third orders). Grating with a duty cycle of ~1:3 gave relatively balanced power division among the 0, plusmn1, and plusmn2nd diffracted orders.\",\"PeriodicalId\":384775,\"journal\":{\"name\":\"2007 Conference on Lasers and Electro-Optics - Pacific Rim\",\"volume\":\"7 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-12-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 Conference on Lasers and Electro-Optics - Pacific Rim\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CLEOPR.2007.4391394\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 Conference on Lasers and Electro-Optics - Pacific Rim","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CLEOPR.2007.4391394","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabrication of Diffraction Gratings for Producing Balanced Diffraction Orders
We made surface-relief gratings of photoresist with different duty cycles in order to achieve relatively balanced intensities of the diffracted orders (up to the third orders). Grating with a duty cycle of ~1:3 gave relatively balanced power division among the 0, plusmn1, and plusmn2nd diffracted orders.
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