复合阴极弯曲磁体束分离真空电弧离子源

2016 27th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV) Pub Date : 2016-09-01 DOI:10.1109/DEIV.2016.7764029

K. Savkin, E. Oks, V. Gushenets, V. Frolova, A. Nikolaev, G. Yushkov

{"title":"复合阴极弯曲磁体束分离真空电弧离子源","authors":"K. Savkin, E. Oks, V. Gushenets, V. Frolova, A. Nikolaev, G. Yushkov","doi":"10.1109/DEIV.2016.7764029","DOIUrl":null,"url":null,"abstract":"The paper reports on a mass-charge spectrometry study of ion beams extracted from the plasma of a vacuum arc discharge with a compound lanthanum hexaboride cathode. The elemental composition of the ion beams was analyzed using a magnetic separator. The vacuum arc operated in repetitive pulsed mode with a current amplitude of 140 A, full width at the base of ~350 μs, and frequency of 2 Hz. The ion-extracting dc voltage was 20 kV. The absolute currents of B+, B2+, and B3+ ions were several hundred microamperes. The extraction of mono-element B ion beams with a low energy spread from the plasma of a vacuum arc is attractive for use in ion beam boriding technologies.","PeriodicalId":296641,"journal":{"name":"2016 27th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV)","volume":"63 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Vacuum arc ion source with compound cathode and beam separation by bending magnet\",\"authors\":\"K. Savkin, E. Oks, V. Gushenets, V. Frolova, A. Nikolaev, G. Yushkov\",\"doi\":\"10.1109/DEIV.2016.7764029\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The paper reports on a mass-charge spectrometry study of ion beams extracted from the plasma of a vacuum arc discharge with a compound lanthanum hexaboride cathode. The elemental composition of the ion beams was analyzed using a magnetic separator. The vacuum arc operated in repetitive pulsed mode with a current amplitude of 140 A, full width at the base of ~350 μs, and frequency of 2 Hz. The ion-extracting dc voltage was 20 kV. The absolute currents of B+, B2+, and B3+ ions were several hundred microamperes. The extraction of mono-element B ion beams with a low energy spread from the plasma of a vacuum arc is attractive for use in ion beam boriding technologies.\",\"PeriodicalId\":296641,\"journal\":{\"name\":\"2016 27th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV)\",\"volume\":\"63 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 27th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/DEIV.2016.7764029\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 27th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DEIV.2016.7764029","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

本文报道了用复合六硼化镧阴极从真空电弧放电等离子体中提取的离子束的质荷谱分析。用磁选机分析了离子束的元素组成。真空电弧工作在重复脉冲模式下，电流幅值为140 a，基底全宽为~350 μs，频率为2 Hz。离子提取直流电压为20 kV。B+、B2+和B3+离子的绝对电流为几百微安。从真空电弧等离子体中提取低能量扩散的单元素B离子束是离子束渗硼技术的重要应用。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Vacuum arc ion source with compound cathode and beam separation by bending magnet

The paper reports on a mass-charge spectrometry study of ion beams extracted from the plasma of a vacuum arc discharge with a compound lanthanum hexaboride cathode. The elemental composition of the ion beams was analyzed using a magnetic separator. The vacuum arc operated in repetitive pulsed mode with a current amplitude of 140 A, full width at the base of ~350 μs, and frequency of 2 Hz. The ion-extracting dc voltage was 20 kV. The absolute currents of B+, B2+, and B3+ ions were several hundred microamperes. The extraction of mono-element B ion beams with a low energy spread from the plasma of a vacuum arc is attractive for use in ion beam boriding technologies.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2016 27th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV)

自引率

0.00%

发文量