NBTI表征的快速Ids - Vgs技术实现

Messaoud Dhia Elhak, Zitouni Abdelkader, Djezzar Boualem, Benabdelmoumene Abdelmadjid, Zatout Boumediene
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引用次数: 2

摘要

在本文中,我们实现了快速$I_{ds}-V_{gs}$技术,以获得p-MOSFET器件的整个特性;越快越好。该技术在NBTI条件下的MSM协议中使用。我们达到了10 $\mu$ s的测量时间;达到了大约100毫秒的应力测量延迟(切换时间)。然而,该技术的优点和缺点已被讨论。此外,还实现并讨论了跨导$(\mathrm{g}_{\mathrm{m}})$、阈下斜率$(SS)$和中隙$(MG)$方法。提取NBTI参数$\Delta \mathrm{V}_{\mathrm{t}\mathrm{h}}, n, \gamma$和$\mathrm{E}_{\mathrm{a}}$,并与其他结果进行比较。时间指数n为0.149。得到了应力时间$\mathrm{t}_{\mathrm{s}}\lt $ 10s的活化能$\mathrm{E}_{\mathrm{a}}$ =0.039eV,场因子$\gamma$ =0.41 $MV.cm^{-1}$。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fast Ids – Vgs Technique Implementation for NBTI Characterization
In this paper, we implemented the fast $I_{ds}-V_{gs}$ technique to get the entire characteristic of p-MOSFET devices; as fast as possible. This technique is used within MSM protocol under NBTI conditions. We reached 10$\mu$s in measurement time; a stress-measure delay (switching time) of about a hundred of milliseconds was reached. However, strengths and weaknesses of the technique have been discussed. Furthermore, Transconductance $(\mathrm{g}_{\mathrm{m}})$, subthreshold slope $(SS)$ and mid-gap $(MG)$ methods have also been implemented and discussed. NBTI parameter i.e. $\Delta \mathrm{V}_{\mathrm{t}\mathrm{h}}, n, \gamma$ and $\mathrm{E}_{\mathrm{a}}$ are extracted and compared to other results. A time exponent n of 0.149 has been touched. Activation energy $\mathrm{E}_{\mathrm{a}}$=0.039eV and a field factor $\gamma$=0.41 $MV.cm^{-1}$ for a stress time $\mathrm{t}_{\mathrm{s}}\lt $10s have been obtained.
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