{"title":"基于声光模式耦合的MOEMS陀螺仪","authors":"Shu-xiang Lu, Shufen Chen, Yi Zhao","doi":"10.1117/12.888635","DOIUrl":null,"url":null,"abstract":"A novel structure of Micro-Optic-Electro-Mechanical-System (MOEMS) gyroscope was designed. Optical waveguide diffractive component, electro-optical modulator and Surface Acoustic Wave (SAW) sensor etc. were integrated on a XY LiNbO3 substrate. The obtained sensitivity was 12 uVdeg<sup>−1</sup>s<sup>−1</sup> in the angular rate range of 0 –400deg/s.","PeriodicalId":126232,"journal":{"name":"Asia Communications and Photonics Conference and Exhibition","volume":"117 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"MOEMS gyroscope based on acoustooptic mode coupling\",\"authors\":\"Shu-xiang Lu, Shufen Chen, Yi Zhao\",\"doi\":\"10.1117/12.888635\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A novel structure of Micro-Optic-Electro-Mechanical-System (MOEMS) gyroscope was designed. Optical waveguide diffractive component, electro-optical modulator and Surface Acoustic Wave (SAW) sensor etc. were integrated on a XY LiNbO3 substrate. The obtained sensitivity was 12 uVdeg<sup>−1</sup>s<sup>−1</sup> in the angular rate range of 0 –400deg/s.\",\"PeriodicalId\":126232,\"journal\":{\"name\":\"Asia Communications and Photonics Conference and Exhibition\",\"volume\":\"117 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-12-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Asia Communications and Photonics Conference and Exhibition\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.888635\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Asia Communications and Photonics Conference and Exhibition","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.888635","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
MOEMS gyroscope based on acoustooptic mode coupling
A novel structure of Micro-Optic-Electro-Mechanical-System (MOEMS) gyroscope was designed. Optical waveguide diffractive component, electro-optical modulator and Surface Acoustic Wave (SAW) sensor etc. were integrated on a XY LiNbO3 substrate. The obtained sensitivity was 12 uVdeg−1s−1 in the angular rate range of 0 –400deg/s.
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