在粗糙的衬底上确定片上TLR校准的参考阻抗

1996 26th European Microwave Conference Pub Date : 1996-10-01 DOI:10.1109/EUMA.1996.337545

R. Gillon, J. Raskin, D. Vanhoenacker, J. Colinge

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引用次数: 22

摘要

本文提出了一种有效的参考阻抗测定方法，该方法适用于在各种衬底上进行的TLR校准，包括由低电阻率材料组成的衬底。结果表明，该方法在40ghz频段内有效。它是基于比较直流电阻和散射参数测量的电阻，短路和开路。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Determining the reference impedance of on-wafer TLR calibrations on tossy substrates

This paper presents an efficient reference impedance determination method, which is applicable to TLR calibrations performed on a wide variety of substrates, including those consisting of low resistivity material. The method is shown to be valid up to 40 GHz. It is based on the comparison of DC-resistance and scattering-parameter measurements of a resistor, a short and an open.

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1996 26th European Microwave Conference

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