磁弹性应变传感器用磁镀层的电沉积

L. Tóth, W. Biter
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引用次数: 0

摘要

这项工作的目标是通过在多晶铜线上电沉积“应变敏感”磁性薄膜来开发廉价的应变传感器。本文将讨论应力敏感钢丝的制作方法。采用直流恒流电沉积工艺,利用硫酸盐-氯化物水溶液,将软磁NiFe合金薄膜沉积在0.125 mm直径的导线上。目前的研究重点是阐明获得合适的NiFe薄膜所需的沉积参数。采用光刻技术对金属丝进行掩膜并选择性地沉积NiFe薄膜。建立了电沉积参数,产生了极细的晶体,在传感器的工作负载范围内对应变敏感。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Electrodeposition of magnetic coatings for a magnetoelastic strain sensor
The goal of this work is to develop inexpensive strain sensors by electrodepositing "strain sensitive" magnetic thin films on polycrystalline copper wires. This paper will discuss the fabrication of the stress sensitive wires. A direct current, galvanostatic electrodeposition process, utilizing an aqueous sulfate-chloride electrolyte, was used to deposit the soft-magnetic, NiFe alloy thin films onto 0.125-mm diameter wires. This current investigation focused on elucidating the deposition parameters required for obtaining suitable NiFe thin films. A photolithographic technique was used for masking the wires and selectively depositing the NiFe films. Electrodeposition parameters were established that yielded extremely fine crystallites that were strain sensitive in the operational load range intended for the sensors.
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