基于电子束注入空心阴极辉光放电的大电流离子源

E. Oks, A. Vizir, G. Yushkov
{"title":"基于电子束注入空心阴极辉光放电的大电流离子源","authors":"E. Oks, A. Vizir, G. Yushkov","doi":"10.1109/BEAMS.1998.817011","DOIUrl":null,"url":null,"abstract":"The hollow-cathode glow discharge is harnessed for generation of gas-discharge plasma and production of charged-particle beams at operating pressures of 10/sup -3/-10/sup -1/ Torr. However, the use of this type of discharge as a plasma emitter in wide-aperture gaseous ion sources calls for its operation at a pressure of 10/sup -4/ Torr or less. External injection of extra electrons into the cathode cavity provides a reduction of its lowest limiting operating pressure to below 10/sup -4/ Torr. At this pressure the electric strength of the acceleration gap is sufficient to extract an ion beam of energy several tens of KeV, and the scattering and resonance charge exchange of accelerated ions at residual gas atoms affect the parameters of the beam in this transportation toward a target only slightly. The paper is devoted to an investigation of the mass-charge composition of an ion beam extracted from the plasma of this type of high-current discharge.","PeriodicalId":410823,"journal":{"name":"12th International Conference on High-Power Particle Beams. BEAMS'98. Proceedings (Cat. No.98EX103)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"A high-current ion source based on a hollow-cathode glow discharge with e-beam injection\",\"authors\":\"E. Oks, A. Vizir, G. Yushkov\",\"doi\":\"10.1109/BEAMS.1998.817011\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The hollow-cathode glow discharge is harnessed for generation of gas-discharge plasma and production of charged-particle beams at operating pressures of 10/sup -3/-10/sup -1/ Torr. However, the use of this type of discharge as a plasma emitter in wide-aperture gaseous ion sources calls for its operation at a pressure of 10/sup -4/ Torr or less. External injection of extra electrons into the cathode cavity provides a reduction of its lowest limiting operating pressure to below 10/sup -4/ Torr. At this pressure the electric strength of the acceleration gap is sufficient to extract an ion beam of energy several tens of KeV, and the scattering and resonance charge exchange of accelerated ions at residual gas atoms affect the parameters of the beam in this transportation toward a target only slightly. The paper is devoted to an investigation of the mass-charge composition of an ion beam extracted from the plasma of this type of high-current discharge.\",\"PeriodicalId\":410823,\"journal\":{\"name\":\"12th International Conference on High-Power Particle Beams. BEAMS'98. Proceedings (Cat. No.98EX103)\",\"volume\":\"19 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-06-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"12th International Conference on High-Power Particle Beams. BEAMS'98. Proceedings (Cat. No.98EX103)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/BEAMS.1998.817011\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"12th International Conference on High-Power Particle Beams. BEAMS'98. Proceedings (Cat. No.98EX103)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/BEAMS.1998.817011","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

在10/sup -3/-10/sup -1/ Torr的工作压力下,利用空心阴极辉光放电产生气体放电等离子体和带电粒子束。然而,在大孔径气体离子源中使用这种类型的放电作为等离子体发射器要求其在10/sup -4/ Torr或更低的压力下运行。在阴极腔中注入额外的电子可以将其最低极限操作压力降低到10/sup -4/ Torr以下。在此压力下,加速间隙的电强度足以提取能量为几十KeV的离子束,加速离子在残余气体原子处的散射和共振电荷交换对离子束向目标输运的参数影响很小。本文研究了从这种大电流放电的等离子体中提取的离子束的质量-电荷组成。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A high-current ion source based on a hollow-cathode glow discharge with e-beam injection
The hollow-cathode glow discharge is harnessed for generation of gas-discharge plasma and production of charged-particle beams at operating pressures of 10/sup -3/-10/sup -1/ Torr. However, the use of this type of discharge as a plasma emitter in wide-aperture gaseous ion sources calls for its operation at a pressure of 10/sup -4/ Torr or less. External injection of extra electrons into the cathode cavity provides a reduction of its lowest limiting operating pressure to below 10/sup -4/ Torr. At this pressure the electric strength of the acceleration gap is sufficient to extract an ion beam of energy several tens of KeV, and the scattering and resonance charge exchange of accelerated ions at residual gas atoms affect the parameters of the beam in this transportation toward a target only slightly. The paper is devoted to an investigation of the mass-charge composition of an ion beam extracted from the plasma of this type of high-current discharge.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信