基于三维有限元模型的微加工不确定性对气体传感器灵敏度影响评估

K. Sadek, W. Moussa
{"title":"基于三维有限元模型的微加工不确定性对气体传感器灵敏度影响评估","authors":"K. Sadek, W. Moussa","doi":"10.1109/ICMENS.2004.36","DOIUrl":null,"url":null,"abstract":"The uncertainties introduced during some stages of the micro-fabrication process can introduce a variation in the thermal response and calculated sensitivity of micromachined gas sensors. In this paper a parametric study is conducted to investigate the effect of the variation in the thermal characteristics and the electrical characteristics (induced at different levels of the micro-fabrication of CMOS thin films) on the sensitivity of gas micro sensors. Three dimensional finite element modeling was used to conduct the parametric study. The multilevel substructuring modeling technique was used to reduce the computational cost of the analysis. The used substructuring technique is proven to reduce the computational cost of the parametric analysis by a factor that ranges from 57.8 to 78.7%. This expensive computational task has shown that the variation of some material properties can alter the sensitivity of gas micro sensors by a factor that can reach up to 40%. This large variation in sensor performance highlights the essential need for a close monitoring of different parameters involved in various micromachining stages of the gas micro sensors.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Assessment of the Effect of Micro-Fabrication Uncertainties on the Sensitivity of Gas Sensors Using 3-D Finite Element Modeling\",\"authors\":\"K. Sadek, W. Moussa\",\"doi\":\"10.1109/ICMENS.2004.36\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The uncertainties introduced during some stages of the micro-fabrication process can introduce a variation in the thermal response and calculated sensitivity of micromachined gas sensors. In this paper a parametric study is conducted to investigate the effect of the variation in the thermal characteristics and the electrical characteristics (induced at different levels of the micro-fabrication of CMOS thin films) on the sensitivity of gas micro sensors. Three dimensional finite element modeling was used to conduct the parametric study. The multilevel substructuring modeling technique was used to reduce the computational cost of the analysis. The used substructuring technique is proven to reduce the computational cost of the parametric analysis by a factor that ranges from 57.8 to 78.7%. This expensive computational task has shown that the variation of some material properties can alter the sensitivity of gas micro sensors by a factor that can reach up to 40%. This large variation in sensor performance highlights the essential need for a close monitoring of different parameters involved in various micromachining stages of the gas micro sensors.\",\"PeriodicalId\":344661,\"journal\":{\"name\":\"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)\",\"volume\":\"28 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-08-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMENS.2004.36\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMENS.2004.36","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

在微加工过程的某些阶段引入的不确定性会导致微机械气体传感器的热响应和计算灵敏度的变化。本文采用参数化方法研究了CMOS薄膜微加工过程中热特性和电特性的变化对气体微传感器灵敏度的影响。采用三维有限元模型进行参数化研究。采用多级子结构建模技术,减少了分析的计算量。所使用的子结构技术被证明可以将参数分析的计算成本降低57.8%至78.7%。这项昂贵的计算任务表明,某些材料特性的变化可以改变气体微传感器的灵敏度,其影响因素可达40%。这种传感器性能的巨大变化突出了对气体微传感器的各个微加工阶段所涉及的不同参数进行密切监测的必要性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Assessment of the Effect of Micro-Fabrication Uncertainties on the Sensitivity of Gas Sensors Using 3-D Finite Element Modeling
The uncertainties introduced during some stages of the micro-fabrication process can introduce a variation in the thermal response and calculated sensitivity of micromachined gas sensors. In this paper a parametric study is conducted to investigate the effect of the variation in the thermal characteristics and the electrical characteristics (induced at different levels of the micro-fabrication of CMOS thin films) on the sensitivity of gas micro sensors. Three dimensional finite element modeling was used to conduct the parametric study. The multilevel substructuring modeling technique was used to reduce the computational cost of the analysis. The used substructuring technique is proven to reduce the computational cost of the parametric analysis by a factor that ranges from 57.8 to 78.7%. This expensive computational task has shown that the variation of some material properties can alter the sensitivity of gas micro sensors by a factor that can reach up to 40%. This large variation in sensor performance highlights the essential need for a close monitoring of different parameters involved in various micromachining stages of the gas micro sensors.
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