{"title":"基于边缘发射器密封封装在微加工硅结构中的低成本10gbit /s TOSA模块的简化光耦合和对准方案","authors":"M. Winter, R. Hauffe, A. Kilian","doi":"10.1109/OFC.2005.193030","DOIUrl":null,"url":null,"abstract":"Packaging of opto-electronic components - as opposed to semiconductor or electronics ICs - requires not only hermeticity but also proper alignment of optical elements. Due to tolerances in the range of a few microns at best, conventional technology usually requires laborious active alignment steps to couple light efficiently into the fiber. A simple optical coupling and alignment scheme is presented which enables the fabrication of cost effective 10 Gbit/s TOSA (transmitter optical sub-assembly) modules which are based on edge-emitting laser diodes packaged hermetically in micro-machined silicon structures.","PeriodicalId":265561,"journal":{"name":"OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005.","volume":"43 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Simplified optical coupling and alignment scheme for cost effective 10 Gbit/s TOSA modules based on edge emitters hermetically packaged in micro-machined silicon structures\",\"authors\":\"M. Winter, R. Hauffe, A. Kilian\",\"doi\":\"10.1109/OFC.2005.193030\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Packaging of opto-electronic components - as opposed to semiconductor or electronics ICs - requires not only hermeticity but also proper alignment of optical elements. Due to tolerances in the range of a few microns at best, conventional technology usually requires laborious active alignment steps to couple light efficiently into the fiber. A simple optical coupling and alignment scheme is presented which enables the fabrication of cost effective 10 Gbit/s TOSA (transmitter optical sub-assembly) modules which are based on edge-emitting laser diodes packaged hermetically in micro-machined silicon structures.\",\"PeriodicalId\":265561,\"journal\":{\"name\":\"OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005.\",\"volume\":\"43 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-03-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OFC.2005.193030\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OFC.2005.193030","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Simplified optical coupling and alignment scheme for cost effective 10 Gbit/s TOSA modules based on edge emitters hermetically packaged in micro-machined silicon structures
Packaging of opto-electronic components - as opposed to semiconductor or electronics ICs - requires not only hermeticity but also proper alignment of optical elements. Due to tolerances in the range of a few microns at best, conventional technology usually requires laborious active alignment steps to couple light efficiently into the fiber. A simple optical coupling and alignment scheme is presented which enables the fabrication of cost effective 10 Gbit/s TOSA (transmitter optical sub-assembly) modules which are based on edge-emitting laser diodes packaged hermetically in micro-machined silicon structures.