VMOS EPROM的制造与表征

D. Draper, J. Barnes, F. Jenne
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引用次数: 1

摘要

本文给出了VMOS EPROM器件性能的实验结果。介绍了该器件的制作,然后给出了可编程性和数据保留的数据。该器件程序比其他EPROM器件具有更低的施加电压,其预测的数据保留特性预测在150°C结温下40年内阈值下降小于1伏。本文还介绍了用于电路仿真的EPROM器件建模。根据VMOS的几何结构,给出了与器件相关的电容的计算方法,结果表明,由于漏极耦合,不存在弱反转电流。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fabrication and characterization of a VMOS EPROM
This paper presents experimental results for the performance of the VMOS EPROM device. The fabrication of the device is presented, followed by data for programmability and data retention. The device programs with lower applied voltages than other EPROM devices, and its projected data retention characteristic predicts a threshold drop of less than 1 volt in 40 years at 150°C junction temperature. EPROM device modeling for use in circuit simulation is also presented. Methods to calculate the capacitors associated with the device are shown for the VMOS geometry, and it is shown that no weak-inversion current exists due to drain coupling.
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