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对3D-NAND技术的全面认识(特邀)

2018 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA) Pub Date : 2018-11-01 DOI:10.1109/CICTA.2018.8705954
J. An
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引用次数: 1

摘要

本文基于已发表的有关3D NAND的技术、工艺、器件和可靠性的工作，综述了最近3D NAND的一些发展。
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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Some Comprehensive Understanding of 3D-NAND Technology (Invited)
this paper reviews some recent 3D NAND development based on published work related to its technology, process, devices and reliability.
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来源期刊
2018 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA)
2018 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA)
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