电致发光法研究氮化镓HFET结构缺陷

J. Priesol, A. Šatka, L. Sladek, M. Bernat, D. Donoval
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引用次数: 0

摘要

该贡献涉及在室温和漏源电压范围为20至30 V的耗尽模式(正常导通)InAlN/GaN异质结构场效应晶体管(hfet)发出的电致发光的检测和分析。收集的电致发光图用于揭示和定位影响其功能和可靠性的GaN hfet的强电应力和关键区域。这种缺陷区域沿着栅极指以及在晶体管结构本身外扩展的漏极接触垫的边缘被观察到。对观察到的HFET缺陷的识别为优化HFET技术提供了有价值的反馈,对此类先进电子器件的质量和整体电子性能具有积极影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Investigation of defects in GaN HFET structures by electroluminescence
This contribution deals with the detection and analysis of electroluminescence emitted by depletion mode (normally-on) InAlN/GaN heterostructure field effect transistors (HFETs) at room temperature and drain-source voltages ranging from 20 to 30 V. Collected electroluminescence maps are used to reveal and localize strong electrically stressed and critical regions of GaN HFETs influencing their functionality and reliability. Such defective regions have been observed along gate fingers as well as at the edges of the drain contact pad expanded outside the transistor structure itself. Identification of observed HFET imperfections provides a valuable feedback towards the optimization of HFET's technology with positive impact on the quality and overall electronic performance of such advanced electronic devices.
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