{"title":"压电薄膜沉积:自组装岛状结构及低温加工","authors":"S. Sriram, M. Bhaskaran, A. Mitchell","doi":"10.1109/COMMAD.2010.5699762","DOIUrl":null,"url":null,"abstract":"New deposition regimes for strontium-doped lead zirconate titanate (PSZT) piezoelectric thin films on silicon substrates are outlined in this work. Optimised conditions have enabled the demonstration of an intermetallic reaction driven self-assembly process for formation of islands of piezoelectric and the use of lattice guiding by a metal layer to perform low temperature deposition of piezoelectric thin films.","PeriodicalId":129653,"journal":{"name":"2010 Conference on Optoelectronic and Microelectronic Materials and Devices","volume":"258 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Piezoelectric thin film deposition: Self-assembled island structures and low temperature processing\",\"authors\":\"S. Sriram, M. Bhaskaran, A. Mitchell\",\"doi\":\"10.1109/COMMAD.2010.5699762\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"New deposition regimes for strontium-doped lead zirconate titanate (PSZT) piezoelectric thin films on silicon substrates are outlined in this work. Optimised conditions have enabled the demonstration of an intermetallic reaction driven self-assembly process for formation of islands of piezoelectric and the use of lattice guiding by a metal layer to perform low temperature deposition of piezoelectric thin films.\",\"PeriodicalId\":129653,\"journal\":{\"name\":\"2010 Conference on Optoelectronic and Microelectronic Materials and Devices\",\"volume\":\"258 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 Conference on Optoelectronic and Microelectronic Materials and Devices\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/COMMAD.2010.5699762\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 Conference on Optoelectronic and Microelectronic Materials and Devices","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/COMMAD.2010.5699762","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Piezoelectric thin film deposition: Self-assembled island structures and low temperature processing
New deposition regimes for strontium-doped lead zirconate titanate (PSZT) piezoelectric thin films on silicon substrates are outlined in this work. Optimised conditions have enabled the demonstration of an intermetallic reaction driven self-assembly process for formation of islands of piezoelectric and the use of lattice guiding by a metal layer to perform low temperature deposition of piezoelectric thin films.
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