{"title":"用于光刻透镜制造的HeCd相位测量干涉仪","authors":"R. Mahany","doi":"10.1364/oft.1990.owa2","DOIUrl":null,"url":null,"abstract":"Phase measuring interferometers have long been used as metrology systems in the manufacturing of precision optical elements and lens systems. Their computational power coupled with recent advances in rapid data taking permit users to perform complex analysis in a cost effective fashion. This paper will describe the use of a commercially available PMI Software System which was integrated with a specialized interferometer design to perform in process testing of a precision photolithographic objective lens.","PeriodicalId":354934,"journal":{"name":"Optical Fabrication and Testing","volume":"24 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"HeCd Phase Measuring Interferometer Used in Photolithographic Lens Manufacture\",\"authors\":\"R. Mahany\",\"doi\":\"10.1364/oft.1990.owa2\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Phase measuring interferometers have long been used as metrology systems in the manufacturing of precision optical elements and lens systems. Their computational power coupled with recent advances in rapid data taking permit users to perform complex analysis in a cost effective fashion. This paper will describe the use of a commercially available PMI Software System which was integrated with a specialized interferometer design to perform in process testing of a precision photolithographic objective lens.\",\"PeriodicalId\":354934,\"journal\":{\"name\":\"Optical Fabrication and Testing\",\"volume\":\"24 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Fabrication and Testing\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/oft.1990.owa2\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Fabrication and Testing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/oft.1990.owa2","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
HeCd Phase Measuring Interferometer Used in Photolithographic Lens Manufacture
Phase measuring interferometers have long been used as metrology systems in the manufacturing of precision optical elements and lens systems. Their computational power coupled with recent advances in rapid data taking permit users to perform complex analysis in a cost effective fashion. This paper will describe the use of a commercially available PMI Software System which was integrated with a specialized interferometer design to perform in process testing of a precision photolithographic objective lens.
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