{"title":"固体浸没透镜系统中间隙引起的像差特性","authors":"J. Jo, T. Milster, J. K. Erwin","doi":"10.1109/ODS.2000.847974","DOIUrl":null,"url":null,"abstract":"The induced phase changes are quantified by varying air gap width. Experiment shows the shape of the gap-induced aberration is well predicted by our simulation. The aberration is characterized by three parameters. The analyzed solid immersion lens (SIL) system is composed of SIL, gap, and substrate. The air gap induces instrumental polarization aberration due to vector thin-film effects. For larger air gaps the changes of phase increase. The astigmatic spot is explained by the increased aberration. Experiment confirms simulation at 300 nm air gap for LaSFN9 (SIL/substrate).","PeriodicalId":215485,"journal":{"name":"2000 Optical Data Storage. Conference Digest (Cat. No.00TH8491)","volume":"37 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Characteristics of gap-induced aberration in solid immersion lens systems\",\"authors\":\"J. Jo, T. Milster, J. K. Erwin\",\"doi\":\"10.1109/ODS.2000.847974\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The induced phase changes are quantified by varying air gap width. Experiment shows the shape of the gap-induced aberration is well predicted by our simulation. The aberration is characterized by three parameters. The analyzed solid immersion lens (SIL) system is composed of SIL, gap, and substrate. The air gap induces instrumental polarization aberration due to vector thin-film effects. For larger air gaps the changes of phase increase. The astigmatic spot is explained by the increased aberration. Experiment confirms simulation at 300 nm air gap for LaSFN9 (SIL/substrate).\",\"PeriodicalId\":215485,\"journal\":{\"name\":\"2000 Optical Data Storage. Conference Digest (Cat. No.00TH8491)\",\"volume\":\"37 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-05-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2000 Optical Data Storage. Conference Digest (Cat. No.00TH8491)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ODS.2000.847974\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 Optical Data Storage. Conference Digest (Cat. No.00TH8491)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ODS.2000.847974","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Characteristics of gap-induced aberration in solid immersion lens systems
The induced phase changes are quantified by varying air gap width. Experiment shows the shape of the gap-induced aberration is well predicted by our simulation. The aberration is characterized by three parameters. The analyzed solid immersion lens (SIL) system is composed of SIL, gap, and substrate. The air gap induces instrumental polarization aberration due to vector thin-film effects. For larger air gaps the changes of phase increase. The astigmatic spot is explained by the increased aberration. Experiment confirms simulation at 300 nm air gap for LaSFN9 (SIL/substrate).
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