超小型、超可靠的创新熔断器，可扩展范围从0.35微米到28纳米

2016 International Conference on Microelectronic Test Structures (ICMTS) Pub Date : 2016-03-28 DOI:10.1109/ICMTS.2016.7476195

Shine C. Chung, Wen-Kuan Fang, Y. Hsu, J. Hsiao, L. Lin, Wen-Hua Yu

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引用次数: 2

摘要

I-fuse是一种基于保险丝的技术，具有(a) 1R1D电池，(b)限制编程低于临界电流，以及(c)小电池，以提高编程效率，通过300°c下4,290小时的认证。测试结构由单个1R1D结构和微型阵列组成，用于表征(a)临界电流，(b)二极管特性和(c)电池电流分布。

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Ultra-small and ultra-reliable innovative fuses scalable from 0.35um to 28nm

I-fuse is a fuse-based technology having (a) 1R1D cell, (b) limited programming below a critical current, and (c) small cell to improve program efficiency to pass qualification at 300°C for 4,290 hours. Test structures consist of single 1R1D structure and mini-arrays are used to characterize (a) critical current, (b) diode characteristics, and (c) cell current distribution.

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来源期刊

2016 International Conference on Microelectronic Test Structures (ICMTS)

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