电极厚度和间距对表面声波延迟线传感能力的影响

Sheeja P. George, J. Isaac, J. Philip
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引用次数: 2

摘要

本文首次利用商用有限元分析工具ANSYS分析了电极厚度、电极间距和结构对X-Y铌酸锂(LiNbO3)延迟线谐振频率的影响。对不同的电极材料——铝、铜和金进行了一系列的模拟。每个参数都对谐振频率有影响,通过仔细设计这些参数,可以为滤波器、传感器和执行器等应用实现适当的延迟线。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effect of Electrode Thickness and Spacing in the Sensing Capabilities of Surface Acoustic Wave Delay Lines
The effect of electrode thickness, electrode spacing and configurations on the resonance frequency of X-Y Lithium Niobate (LiNbO3) delay line using commercial finite element analysis tool ANSYS is presented for the first time in this study. The series of simulations is carried out for different electrode materials—Aluminium, Copper and Gold. Each of the parameters has an impact on the resonance frequency and by the careful design of these parameters, the appropriate delay line can be realized for applications such as filters, sensors and actuators.
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