角选择斜柱膜的调谐吸收

Sasha Woodward-Gagné, O. Zabeida, B. Baloukas, L. Martinu
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引用次数: 0

摘要

将TiN原子层沉积在SiO2斜柱薄膜上,制备了核壳斜柱薄膜(SCTF)。该薄膜表现出与金属sctf相似的角选择性,并具有高度可调的吸收。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Tuning Absorption in Angular Selective Slanted Column Films
Core-shell slanted column thin films (SCTF) are made through atomic layer deposition of TiN over SiO2 SCTFs. The films exhibit angular selectivity similar to metallic SCTFs with the added benefit of highly tunable absorption.
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