具有均匀轴向灵敏度的三轴压阻式加速度计

2011 Second International Conference on Intelligent Systems, Modelling and Simulation Pub Date : 2011-01-25 DOI:10.1109/ISMS.2011.66

T. Tan, Nguyen Tien Anh

{"title":"具有均匀轴向灵敏度的三轴压阻式加速度计","authors":"T. Tan, Nguyen Tien Anh","doi":"10.1109/ISMS.2011.66","DOIUrl":null,"url":null,"abstract":"A three-axis piezoresistive accelerometer which has uniform sensitivities to three axes was developed using Micro Electro Mechanical Systems (MEMS) technology. This sensor which is made of a heavy proof mass and four long beams allow us to obtain high sensitivities by reducing the resonant frequencies. Uniform axial sensitivities with small cross axis sensitivity could be obtained by a three-dimensional sensor structure.","PeriodicalId":193599,"journal":{"name":"2011 Second International Conference on Intelligent Systems, Modelling and Simulation","volume":"92 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":"{\"title\":\"Three-axis Piezoresistive Accelerometer with Uniform Axial Sensitivities\",\"authors\":\"T. Tan, Nguyen Tien Anh\",\"doi\":\"10.1109/ISMS.2011.66\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A three-axis piezoresistive accelerometer which has uniform sensitivities to three axes was developed using Micro Electro Mechanical Systems (MEMS) technology. This sensor which is made of a heavy proof mass and four long beams allow us to obtain high sensitivities by reducing the resonant frequencies. Uniform axial sensitivities with small cross axis sensitivity could be obtained by a three-dimensional sensor structure.\",\"PeriodicalId\":193599,\"journal\":{\"name\":\"2011 Second International Conference on Intelligent Systems, Modelling and Simulation\",\"volume\":\"92 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-01-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 Second International Conference on Intelligent Systems, Modelling and Simulation\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISMS.2011.66\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 Second International Conference on Intelligent Systems, Modelling and Simulation","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISMS.2011.66","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 7

摘要

采用微机电系统(MEMS)技术，研制了三轴均匀灵敏度的压阻式加速度计。这种传感器是由一个沉重的证明质量和四个长光束使我们能够获得高灵敏度，通过降低谐振频率。三维传感器结构可以获得均匀的轴向灵敏度和较小的交叉轴灵敏度。

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Three-axis Piezoresistive Accelerometer with Uniform Axial Sensitivities

A three-axis piezoresistive accelerometer which has uniform sensitivities to three axes was developed using Micro Electro Mechanical Systems (MEMS) technology. This sensor which is made of a heavy proof mass and four long beams allow us to obtain high sensitivities by reducing the resonant frequencies. Uniform axial sensitivities with small cross axis sensitivity could be obtained by a three-dimensional sensor structure.

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2011 Second International Conference on Intelligent Systems, Modelling and Simulation

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