Fabrication and Machining of SiCN for Pressure Sensor at High Temperature for Aero-Engines Applications

This work presents few issues related to fabrication, machining, associated to the usage of SiCN for pressure measurement systems that can operate under high temperature conditions. The sensor must meet the required performance without being susceptible to the influence of temperature variation. The pressure sensor as presently conceived comprises of a slender sensitive element and a thick blocking element, hence the realization of such kind of sensor requires thick film (about 2-3 mm thick) and thin film (40-60 μm thick) made of SiCN. The dimensions and thickness of the films are dependent on the application for which the sensors are intended to be used. Fabrication methods of SiCN ceramics both as thin and thick films that could be used for high temperature applications are discussed. In addition, the influences of thermosetting and annealing temperatures on mechanical properties are investigated. The material properties related to sensing properties are investigated.