高氧空位氧化锡薄膜气体传感器的研究

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI:10.1109/NEMS.2012.6196870

Chen Lin, Dacheng Zhang, Xiaodi Liu

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引用次数: 5

摘要

本文成功制备了采用高氧空位纳米氧化锡薄膜的气体传感器，并对其进行了测试，以确定影响其气敏性的因素。首先利用ANSYS™软件对氧化锡薄膜和整个气体传感器的稳态温度分布进行了电热模拟。然后用x射线光电子能谱(XPS)分析了在O2中煅烧两次的氧化锡的成分。XPS结果表明，该条件下的氧化锡具有较高的氧空位。最后，测试了该气体传感器在不同工作电压和不同焙烧条件下的乙醇传感和湿度传感性能。实验结果表明，通过改变内部和外部因素，可以实现高灵敏度的气体传感器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A study of tin oxide thin film gas sensors with high oxygen vacancies

In this paper, gas sensors employing nanoscale tin oxide films of high oxygen vacancies were successfully made and tested in order to determine which factors affected the gas sensitivity of them. Firstly electrothermal simulations were carried out to predict the steady-state temperature distributions of the tin oxide thin film and the overall gas sensor using ANSYS™. Then the composition of the tin oxide calcined twice in O2 was analyzed by X-ray photoelectron spectroscopy (XPS). The result of XPS showed that the tin oxide under this condition had high oxygen vacancies. Finally, the ethanol sensing and humidity sensing properties of the gas sensors at various operating voltages and calcined in different conditions were tested. The experimental results showed that high gas sensitivity of the gas sensors could be achieved by changing the internal and external factors.

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来源期刊

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

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