自动RRAM测量使用半自动探头站和ArC ONE接口

2023 35th International Conference on Microelectronic Test Structure (ICMTS) Pub Date : 2023-03-27 DOI:10.1109/ICMTS55420.2023.10094156

Alin Panca, A. Serb, S. Stathopoulos, S. K. Garlapati, T. Prodromakis

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引用次数: 0

摘要

电阻式随机存取技术(RRAM)正在迅速走向工业成熟。然而，实现持久商业成功的一个关键因素是自动化测试;对于性能基准测试和新技术的快速原型设计非常有用。本文提出了一种晶圆级半自动RRAM器件测试平台。

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Automated RRAM measurements using a semi-automated probe station and ArC ONE interface

Resistive Random Access Technology (RRAM) is quickly reaching industrial maturity. A key element towards achieving lasting commercial success, however, is automated testing; useful for performance benchmarking and rapid prototyping of new flavours of technology. Here we present a wafer-scale semi-automated RRAM device testing platform.

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2023 35th International Conference on Microelectronic Test Structure (ICMTS)

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