聚合物电光器件在电子电路中的垂直集成

S. Kalluri, Antao Chen, M. Ziari, W. Steier, Zhiyong Liang, L. Dalton, Datong Chen, B. Jalali, H. Fetterman
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引用次数: 1

摘要

在过去的十年中,光电子领域的一个主要研究课题是光子器件与电子电路的集成。这里的主要障碍是电子和光子学所需的不同材料系统的制造不兼容。在光纤通信中应用的大多数集成光子器件是由化合物半导体(激光器、调制器、探测器)或晶体电介质(调制器)制成的。另一方面,硅电子(或高速GaAs)是高度发达的,可以通过半导体代工厂获得。为了将这种先进的电子技术与传统的光子学技术相结合,需要诸如倒装芯片键合、外延提升、焊料凸点技术和其他形式的混合集成技术。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Vertical Integration of Polymer Electro-Optic Devices on Electronic Circuits
A major topic of research in the opto-electronics field over the last decade has been the integration of photonic devices with electronic circuits. The major hurdle here is the fabrication incompatibility of the different material systems required for electronics and photonics. Most integrated photonic devices with applications in fiber communications are fabricated from compound semiconductors (lasers, modulators, detectors) or from crystalline dielectrics (modulators). On the other hand Si electronics (or GaAs for high speed) are highly developed and available through semiconductor foundries. To integrate this well developed electronics technology with conventional photonics technology has required techniques like flip chip bonding, epitaxial liftoff, solder bump technology and other forms of hybrid integration.
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