评价碳纳米管微翅片冷却器和石墨烯类散热器的热点测试结构

2016 International Conference on Microelectronic Test Structures (ICMTS) Pub Date : 2016-03-28 DOI:10.1109/ICMTS.2016.7476169

K. Jeppson, J. Bao, Shirong Huang, Yong Zhang, Shuangxi Sun, Yifeng Fu, Johan Liu

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引用次数: 3

摘要

描述了用于评估碳纳米管、石墨烯和氮化硼的热性能的热点产生和温度传感测试结构的设计、制造和使用，这些测试结构用于3D集成芯片堆栈、功率放大器和发光二极管等电子器件的冷却。测试结构是一个简单的曲线形金属电阻，既充当热点，又充当温度温度计。通过使用该测试结构，上述新兴材料对热点温度的影响已经得到了很好的评估精度(±0.5°C)。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Hotspot test structures for evaluating carbon nanotube microfin coolers and graphene-like heat spreaders

The design, fabrication, and use of a hotspot-producing and temperature-sensing test structure for evaluating the thermal properties of carbon nanotubes, graphene and boron nitride for cooling of electronic devices in applications like 3D integrated chip-stacks, power amplifiers and light-emitting diodes is described. The test structure is a simple meander-shaped metal resistor serving both as the hotspot and the temperature thermo-meter. By use of this test structure, the influence of emerging materials like those mentioned above on the temperature of the hotspot has been evaluated with good accuracy (±0.5°C).

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2016 International Conference on Microelectronic Test Structures (ICMTS)

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