非侵入式电容式压力传感器:微加工工艺和首次机电特性

T. Dinh, P. Joubert, E. Martincic, E. Dufour-Gergam
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引用次数: 1

摘要

采用薄膜转移新技术制备了基于光子的柔性压力传感器阵列。这些传感器专门用于机器人、运动和医疗应用中的压力/力的非侵入性测量。该传感器是电容式的,由两个毫米铜电极组成,由聚二甲基硅氧烷(PDMS)可变形介电层隔开。在柔性阵列上,非常小的曲率半径是可能的,而不会损坏传感器。阵列电容的不均匀性很低(与平均值相比偏差为±7%)。该工艺准确,重现性好(转移收率100%)。本文还介绍了其电学特性。在初步的机电特性中,在300 kPa的法向应力下,具有660 μm厚度的PDMS介电层和480 fF的自由负载电容的传感器的电容变化为17%。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Non-invasive capacitive pressure sensor: Microfabrication process and first electro-mechanical characterization
Kapton-based flexible pressure sensor arrays are fabricated using a new technology of film transfer. The sensors are dedicated to the non-invasive measurement of pressure/force in robotic, sport and medical applications. The sensors are of a capacitive type, and composed of two millimetric copper electrodes, separated by a polydimethylsiloxane (PDMS) deformable dielectric layer. On the flexible arrays, a very small curvature radius is possible without any damage to the sensors. The inhomogeneity of the capacitances in array is quite low (deviation of ±7% compared to the average value). The process is accurate and reproducible (transfer yield of 100%). The electrical characterization is also presented. In the preliminary electro-mechanical characterization, a sensor (with a PDMS dielectric layer of 660 μm thickness and a free load capacitance of 480 fF) undergoes a capacitance change of 17% under a 300 kPa normal stress.
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