采用平行板结构的压电薄膜作动器

1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1997-10-05 DOI:10.1109/MHS.1997.768861

H. Sato, F. Arai, H. Ishihara, T. Fukuda, H. Iwata, K. Itoigawa

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引用次数: 9

摘要

平行梁结构和水热法具有许多显著的特点。结合这些特点，我们采用水热法在平行梁结构上制作了PZT微致动器。研究了原型机的基本性能。提出了该作动器的应用:多自由度作动器、重力传感器和振动陀螺仪。最后，我们测量了输出电压和旋转之间的关系。

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New PZT actuator using piezoelectric thin film on parallel plate structure

The parallel beam structure and the hydrothermal method have many significant features. Combining these features, we made a PZT microactuator by the hydrothermal method on the parallel beam structure. The basic properties of the prototype are investigated. We propose applications of this actuator: the multi degrees of freedom actuator, G-sensor, and vibration gyroscope. Finally, we measured the relationship between output-voltage and rotation.

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来源期刊

1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)

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