基于垂直隧道的双金属双栅TFET设计参数优化

N. Paras, S. S. Chauhan
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引用次数: 2

摘要

本文提出了一种优化设计的基于垂直隧道的双金属双栅隧道场效应晶体管(DMDG-VTFET)。设计参数的选择是为了实现1.33µA的高性能导通电流、近50.5 aA的低待机功率关断电流和11 mV/ 10的亚阈值摆幅(SS)。此外,所提出的TFET遵循国际半导体技术路线图(ITRS)路线图,具有低待机电源开关性能,其ON电流/ OFF电流比(Ion/ Ioff)为1012数量级。这种结果是由于器件的主导载流子隧穿与栅电场一致。这抑制了导致阈下边坡贬值的侧向掘进路径,从而形成了超陡的阈下边坡。通过对隧道闸门和辅助闸门选择合适的工作功能;离子、截止电压和阈值电压VT明显提高。深入研究了外延区高度、源极、沟道、漏极和外延区掺杂浓度、间隔层和介电材料对器件双极性的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Optimization of Design Parameters for Vertical Tunneling Based Dual Metal Dual Gate TFET
In this paper, an optimally designed vertical tunneling based dual metal dual gate tunnel field effect transistor (DMDG-VTFET) is presented. The design parameters are chosen so as to fulfill the high-performance ON-state current of 1.33 µA, low standby power OFF-state current nearly 50.5 aA and Subthreshold Swing (SS) of 11 mV/decade. Moreover, the proposed TFET follows the International Technology Roadmap for Semiconductors (ITRS) roadmap for low standby power switch performance as ON current/ OFF current ratio (Ion/ Ioff) of the order of 1012 is obtained. Such results are attributed to the dominant carrier tunneling of the device which is in line with the gate electric field. This suppressed the lateral tunneling path which was responsible for the depreciation of the subthreshold slope, thus resulting in a super-steep subthreshold slope. By selecting appropriate work function on tunnel gate and auxiliary gate; Ion, Ioff and threshold voltage VT are significantly improved. Impact of epitaxial region height, source, channel, drain and epitaxial region doping concentration, spacer and dielectric material on ambipolarity of the device is thoroughly studied.
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