{"title":"光电传感技术中的微加工技术","authors":"C. Gorecki","doi":"10.1117/12.517046","DOIUrl":null,"url":null,"abstract":"This paper examines the contribution of MEMS/MOEMS technology in the specific context of optical fiber sensing technology. A number of demonstrator sensors will be discussed, with special emphasis to sensors with micromachined integrated optic structures, nano-scale SNOM sensors, and fiber-to-waveguide coupling systems.","PeriodicalId":405495,"journal":{"name":"Optoelectronic and Electronic Sensors","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-09-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Micromachining technology in optoelectronic sensing technologies\",\"authors\":\"C. Gorecki\",\"doi\":\"10.1117/12.517046\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper examines the contribution of MEMS/MOEMS technology in the specific context of optical fiber sensing technology. A number of demonstrator sensors will be discussed, with special emphasis to sensors with micromachined integrated optic structures, nano-scale SNOM sensors, and fiber-to-waveguide coupling systems.\",\"PeriodicalId\":405495,\"journal\":{\"name\":\"Optoelectronic and Electronic Sensors\",\"volume\":\"22 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-09-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optoelectronic and Electronic Sensors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.517046\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optoelectronic and Electronic Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.517046","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Micromachining technology in optoelectronic sensing technologies
This paper examines the contribution of MEMS/MOEMS technology in the specific context of optical fiber sensing technology. A number of demonstrator sensors will be discussed, with special emphasis to sensors with micromachined integrated optic structures, nano-scale SNOM sensors, and fiber-to-waveguide coupling systems.
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