径向阵列均匀型氮化铝压电微机械超声换能器的设计与工艺

2021 Smart Systems Integration (SSI) Pub Date : 2021-04-27 DOI:10.1109/SSI52265.2021.9467017

C. Stoeckel, M. Melzer, Katja Meinel, M. Tavakolibasti, R. Forke, S. Zimmermann, T. Otto, H. Kuhn

{"title":"径向阵列均匀型氮化铝压电微机械超声换能器的设计与工艺","authors":"C. Stoeckel, M. Melzer, Katja Meinel, M. Tavakolibasti, R. Forke, S. Zimmermann, T. Otto, H. Kuhn","doi":"10.1109/SSI52265.2021.9467017","DOIUrl":null,"url":null,"abstract":"This paper reports on design, technology and mechanical characterization in air of a piezoelectric aluminum nitride (AlN) based micromachined ultrasonic transducer (PMUT) with six radial symmetric arrays. The PMUT consists of 4018 single membranes with a resonance frequency of 3.4 MHz, a quasi-static deflection of 272 pm/V and a resonant deflection of up to 71.3 nm/V. The small standard deviation of the resonance frequency over the chip is 47 kHz.","PeriodicalId":382081,"journal":{"name":"2021 Smart Systems Integration (SSI)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-04-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Design and technology for uniform aluminum nitride piezoelectric micromachined ultrasonic transducers with radial array\",\"authors\":\"C. Stoeckel, M. Melzer, Katja Meinel, M. Tavakolibasti, R. Forke, S. Zimmermann, T. Otto, H. Kuhn\",\"doi\":\"10.1109/SSI52265.2021.9467017\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports on design, technology and mechanical characterization in air of a piezoelectric aluminum nitride (AlN) based micromachined ultrasonic transducer (PMUT) with six radial symmetric arrays. The PMUT consists of 4018 single membranes with a resonance frequency of 3.4 MHz, a quasi-static deflection of 272 pm/V and a resonant deflection of up to 71.3 nm/V. The small standard deviation of the resonance frequency over the chip is 47 kHz.\",\"PeriodicalId\":382081,\"journal\":{\"name\":\"2021 Smart Systems Integration (SSI)\",\"volume\":\"8 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-04-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2021 Smart Systems Integration (SSI)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SSI52265.2021.9467017\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 Smart Systems Integration (SSI)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SSI52265.2021.9467017","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

本文报道了一种基于氮化铝(AlN)的六径向对称阵列微机械超声换能器(PMUT)的设计、工艺及其在空气中的力学特性。PMUT由4018个单膜组成，谐振频率为3.4 MHz，准静态偏转为272 pm/V，谐振偏转高达71.3 nm/V。芯片上谐振频率的小标准偏差为47千赫。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Design and technology for uniform aluminum nitride piezoelectric micromachined ultrasonic transducers with radial array

This paper reports on design, technology and mechanical characterization in air of a piezoelectric aluminum nitride (AlN) based micromachined ultrasonic transducer (PMUT) with six radial symmetric arrays. The PMUT consists of 4018 single membranes with a resonance frequency of 3.4 MHz, a quasi-static deflection of 272 pm/V and a resonant deflection of up to 71.3 nm/V. The small standard deviation of the resonance frequency over the chip is 47 kHz.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2021 Smart Systems Integration (SSI)

自引率

0.00%

发文量