{"title":"激光直写法制备大面积衍射光学元件","authors":"Yunjiao Wang, Weiguo Zhang, Zheng Yang, Xin Xiong, Liang-ping Xia, Mingyou Gao, Dong Zhang, Deqiang Wang, Jiahu Yuan","doi":"10.1109/3M-NANO.2016.7824973","DOIUrl":null,"url":null,"abstract":"We present a method to fabricate diffractive optical elements (DOEs) with four phase levels by the Laser Direct Writing technology. One computation method is provided to optimize the step depth, which could improve efficiency of DOEs. The step depth and imaging results demonstrate the fabricated DOEs devices with good optical properties. The effective areas of the DOEs pattern are as large as 49 cm2, which could be replicated easily for mass production applications.","PeriodicalId":273846,"journal":{"name":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-07-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Fabrication of large area diffractive optical elements by laser direct writing\",\"authors\":\"Yunjiao Wang, Weiguo Zhang, Zheng Yang, Xin Xiong, Liang-ping Xia, Mingyou Gao, Dong Zhang, Deqiang Wang, Jiahu Yuan\",\"doi\":\"10.1109/3M-NANO.2016.7824973\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present a method to fabricate diffractive optical elements (DOEs) with four phase levels by the Laser Direct Writing technology. One computation method is provided to optimize the step depth, which could improve efficiency of DOEs. The step depth and imaging results demonstrate the fabricated DOEs devices with good optical properties. The effective areas of the DOEs pattern are as large as 49 cm2, which could be replicated easily for mass production applications.\",\"PeriodicalId\":273846,\"journal\":{\"name\":\"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"volume\":\"20 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-07-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/3M-NANO.2016.7824973\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2016.7824973","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabrication of large area diffractive optical elements by laser direct writing
We present a method to fabricate diffractive optical elements (DOEs) with four phase levels by the Laser Direct Writing technology. One computation method is provided to optimize the step depth, which could improve efficiency of DOEs. The step depth and imaging results demonstrate the fabricated DOEs devices with good optical properties. The effective areas of the DOEs pattern are as large as 49 cm2, which could be replicated easily for mass production applications.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
