真空兼容毫米波源的微加工

4th IEEE International Conference on Vacuum Electronics, 2003 Pub Date : 2003-05-28 DOI:10.1109/IVEC.2003.1286391

L. Sadwick, R. J. Hwu, G. Scheitrum

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引用次数: 5

摘要

InnoSys正在开发从半导体制造和微机械加工中制造毫米波真空电子器件的制造技术。采用LIGA法制备了SU-8射频电路和PPM磁路。电路制造从平面基板开始，并添加和移除由光刻掩模定义的材料。制造电路是毫米波器件中真空包络层的组成部分。

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Microfabrication of vacuum compatible millimeter wave sources

InnoSys is developing a fabrication techniques for manufacturing of millimeter wave vacuum electron devices from semiconductor manufacturing and micromachining. SU-8 RF circuits and PPM magnetic circuits are fabricated by LIGA methods. The circuit fabrication starts with a flat substrate and adds and removes material defined by lithographic masks. Fabricated circuits are integral parts of the vacuum envelope in millimeter wave devices.

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4th IEEE International Conference on Vacuum Electronics, 2003

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