Nonconventional ultra-precision manufacturing of ULE mirror surfaces using atmospheric reactive plasma jets

In this paper we present a non-abrasive surface manufacturing technology suited for fast and efficient figuring of optical surfaces made of ULE (Corning Ultra Low Expansion) glass. Plasma Jet Machining (PJM) technology is based on an atmospheric chemical reactive plasma jet tool that locally interacts with the surface in order to remove material by chemical reactions forming volatile species. ULE has been proven to be suited for the PJM process. It has been found that the volume removal rate is approximately 25% higher than for fused silica and values up to 50mm3/min can be reached with our setup. Thus, figuring and figure error correction of large optics like mirror segments for earth based telescopes can be realized within a reasonable time. In the paper principles of the PJM process as well as ULE specific issues are discussed and machining results are presented.