氮化镓基薄膜的透射光谱分析及参数提取

C. Li, Xue Li, Jin-tong Xu, Yan Zhang, Xiang-yang Li
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引用次数: 2

摘要

近年来,氮化镓基多层材料发展迅速,了解其界面和光学性质对器件的设计和制造具有重要意义。本文对透射光谱进行了分析,并讨论了透射光谱与样品参数的关系。然后,我们得到了一系列氮化镓基样品的透射光谱。对透射光谱进行了仿真,提取了有用的信息。其中一个样品在波长400 ~ 800nm范围内,折射率在2.518 ~ 2.305之间变化不大,消光系数为6x-10-9.5exp(2700/λ),厚度为2860nm。最后,我们得到了GaN和AlGaN薄膜的色散关系,并与其他研究组的结果进行了比较。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Analysis of the transmission spectra and the parameters extraction of the GaN-based films
Nowadays, GaN-based multi-layer materials is developing fast, and it is important to know their interface and optical properties for devices design and fabrication. In this letter, the transmission spectra are analyzed, and the dependence of the transmission spectra on parameters of the samples is discussed. Sequentially, we obtain the transmission spectra of a series of GaN-based samples. Simulation of the transmission spectra is done and useful information is extracted. For one of our samples, the refractive index varies a little between 2.518 and 2.305 with the wavelength from 400 to 800nm, while the extinction coefficient is 6x-10-9.5exp(2700/λ), and the thickness is 2860nm. Finally, we get the dispersion relationship of the GaN and AlGaN films, and it is compared with the results of some other research groups.
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