表面等离子体共振传感器的纳米结构衬底

A. Duval, M. Nakkach, A. Bellemain, J. Moreau, M. Canva, A. Dhawan, T. Vo‐Dinh
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引用次数: 1

摘要

表面等离子体共振(SPR)传感器通常是基于连续的金属薄膜和高折射率棱镜或光栅耦合的传播等离子体(PP)模式。地表演化的定量监测是通过测量角度或光谱倾角位置的位移,或测量角-光谱耦合曲线斜率的反射率变化来完成的。许多实验室都在研究这种传感器,并在越来越多的商业设备中使用。然而,这些系统似乎在灵敏度方面达到了极限[1]。在等离子体传感领域,许多其他工作致力于金属纳米颗粒的研究。我们预计,使用纳米结构衬底来激发耦合的局部等离子体(CLP)或准传播等离子体(QPP)将允许进一步提高传感器的能力,特别是在灵敏度方面。样品采用电子束或深紫外光刻技术实现。实验表征采用实验室自制的angulo-spectral SPR Imaging系统[2]。利用RCWA模拟,我们计算了纳米结构的等离子体响应,以古光谱反射率的形式。一种新型窄槽等离子体纳米光栅传感结构显示出最高的潜力[3]。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Nanostructured substrates for surface plasmon resonance sensors
Surface Plasmon Resonance (SPR) sensors are usually based on continuous thin metallic films and coupling of propagative plasmon (PP) modes using high index prism or grating. The quantitative monitoring of the surface evolution is performed by measuring either shift in angular or spectral dip position, or by reflectivity variation in the slope of the angulo-spectral coupling curve. Such sensors are studied in many laboratories and used in a growing number of commercial devices. It appears however that these systems are reaching their limits in terms of sensitivity [1]. In the field of plasmonic sensing, many other works are devoted to the study of metallic nanoparticles. We anticipate that using nanostructured substrates for exciting coupled localized plasmon (CLP) or quasi propagating plasmon (QPP) will allow to further increase the sensors capabilities, in particular in terms of sensitivity. Samples were realized using either e-beam or deep-UV lithography based techniques. Experimental characterizations were conducted using lab-made angulo-spectral SPR Imaging systems [2]. Using RCWA simulations, we have calculated the plasmonics responses, in term of angulo-spectral reflectivity, of nanostructures. A novel narrow groove plasmonic nano-grating sensing configuration exhibits the highest potential [3].
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